FOR IMMEDIATE RELEASE

Flat-Field Grazing Incidence Spectrometer for Extreme Ultraviolet and Soft X-ray

McPherson, Inc. spectrometers optimized for the Extreme Ultraviolet and Soft X-ray wavelength region. Extreme Ultraviolet (EUV) plasma investigators and light source developers consider a dedicated wavelength range of analysis surrounding the Xenon plasma at 13.5-nm. The new flat field toroidal grating instrument fits this requirement well. It works over two fixed wavelength ranges. Gratings are available for one to 5 nanometers and five to 20-nm (248 to 62-eV.) The angle of incidence and aberration corrections are optimized for the area of interest. The effective blaze wavelengths are about 1.6 and 10-nm respectively. This instrument allows users to work with a relatively simple optical system that delivers good imaging and spectral resolution. The geometry will also allow use of high-sensitivity CCD detectors for direct detection. Microchannel plate (MCP) intensifiers can be employed for systems requiring gating.

The McPherson flat-field imaging grating spectrometer is a practical tool for investigations in the Extreme Ultraviolet. For example, it finds use in Lithography (EUVL) light source development (e.g. laser excited Xenon and other plasma at 13.5-nm) and for diagnostics of short lifetime plasmas, as those formed in tokamak devices.

For astrophysics instrument calibration or just more flexibility, consider the Rowland circle design grazing incidence system Model 248/310G. It provides most flexibility with respect to wavelength range. Many grating choices are available and it delivers excellent spectral resolution.