
Advanced tool(s) for plasma
analysis, 13.5-nm source development and high spectral energy research and quality control
... Instruments for wide spectral ranges and new, compact and windowless sensor designs
combine to deliver simplified and fast data collection for your vacuum and extreme UV
experiments.
Intercept and detect the high-energy vacuum ultraviolet (VUV) and extreme vacuum ultra
violet (EUV) spectrum. McPherson spectrometers in Grazing Incidence, Normal Incidence and
Seya-Namioka designs can now be equipped with windowless, back-illuminated CCD detectors
for direct detection of spectra in these regions. (Think eV's!?) In the EUV extremely high
sensitivity Silicon based sensors combined with the efficient monochromator designs allow
rapid and simplified detection of spectra. Rowland circle grazing instruments as well as
flat field toroidal versions are ideal for high-energy calibration work, plasma analysis
and 13.5-nm source development. Pulsed sources or temporally unstable events can more
quickly and certainly be measured and entire spectra be analyzed. Two models are currently
available. For work in the 1 to 100-nm region specify the Model
248/310G spectrometer. For work from 50 to 200-nm specify the Model
234/302. Both units are available with gratings of various groove densities allowing
factory or user configuration for wide wavelength `survey' or for high resolution `zoom'
spectroscopy.
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