FOR IMMEDIATE RELEASE

A McPherson VUVaS test chamber dedicated to 193 / 157 nm transmission measurements and mapping of large 6025 and 300 mm diameter type samples.

Map Large Samples in Deep UV and Vacuum UV

The McPherson VUVaS allows you to measure and map transmission and reflectance samples over areas as large as 350 mm diameter. About 0.1% precision is attained throughout the region regardless of measurement mode. Even better precision is attained at specific points of interest, for example 193 and 157nm. The McPherson VUVaS provides easy access to the deep and vacuum ultraviolet region (120 to 380-nm) with purged or vacuum environment. This system may be adapted directly to handling systems as used in the semiconductor industry. Measurement chambers are clean and particulate free insuring safety of your valuable sample and high integrity measurements.

Need to map and/or check uniformity of large samples in the Deep and Vacuum Ultraviolet? Call today to learn more or request a quote. Thank you.

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