| Flat Field for XUV, Soft X-ray and Extreme Ultraviolet (EUV)
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McPherson Model 251MX aberration corrected flat field spectrometer uses spherical substrate gratings with aspheric wave-front recording for an aberration corrected, high resolution spectrometer working through the soft x-ray region. Ideal for extreme UV (EUV) analysis, long focal length and straight spectral lines provide good spectral resolution. The Model 251MX delivers easy access to the best grating performance. High quality gratings are readily available. The Model 251MX is well suited to use CCD detectors for direct detection of the high-energy spectra. Microchannel plate (MCP) intensifiers can be reserved for those systems requiring gating.
| Focal Plane Length | ~25mm |
| Angle of Incidence | 87 degrees (<3 degrees grazing) |
| Detector Position | continuously variable, rotatable |
| Grating Mount | 2-position, adjustable in vacuum |
| Zero Order Baffle | standard, adjustable in vacuum |
| Entrance Slit | continuously variable from 10um to 3mm, adjustable in vacuum |
| Wavelength Range | refer to grating of interest for range |
| Deviation Angle Degrees |
G/mm | Resolution (nm) |
Focal Plane Width (mm) |
Spectral Range (nm) |
Spectral Range (eV) | |
| 167 | 1200 | ~ 0.028 | 25 | 5 to 20 | 248 to 62 | |
| 172 | 2400 | ~ 0.01 | 20 | 1 to 5 | 1240 to 248 |
Data Sheet for the soft x-ray spectrometer Model 251MX available here
Data above was collected with direct detection CCD. We used the Model 642 x-ray source with easily exchanged anodes for focusing and resolution testing.
McPherson, Inc. produces spectrometers for work in the Extreme Ultraviolet and Soft X-ray wavelength regions. Consider a flat-field XUV spectrometer for work in a dedicated wavelength range. Examples when this may be practical include the development of high harmonic generation (HHG) laser sources, laser excited or other plasma sources for Extreme Ultraviolet Lithography (EUVL), and diagnostics of short life-time plasmas in tokamak or other experimental devices. For greater flexibility, or astrophysics instrument calibration (for example) consider the Rowland circle design grazing incidence system Model 248/310G. It provides most flexibility with respect to wavelength range. Many grating choices are available and it delivers excellent spectral resolution.