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Extreme Ultraviolet, Soft X-ray, XUV Spectrometers and Monochromators
(~1 nanometer to 310 nanometers, overall)

= Available as a Standard Feature or as an Optional Accessory

Wavelength Range (nm)	Spectral Resolution (nm)	Focal Length (mm)	Model Number	Scanning	Array Detectors	Imaging	Vacuum	Ultra High Vacuum	Spectrometer Optical Design
< 1 to 310	0.018	1,000	248/310G						Grazing Incidence
< 1 to 90	0.015	1,500	252/315						Grazing Incidence
< 1 to 254	0.008	2,200	247						Grazing Incidence
< 1 to 240	0.006	3,000	249						Grazing Incidence
<1 to 70	0.002	10,600	262						Grazing Incidence
1 to 15	0.007	70,000	264						Grazing Incidence
10 to 170	0.05	292	251						Flat Field Toroidal
1 to 20	0.02	5,649	251MX						Flat Field
10 to 300	0.1	320	343						Toroidal
8 to 120	0.1	2,000	XCT						Czerny-Turner, 8deg AOI

Spectral Resolution is Full Width Half Maximum (FWHM) for a system using a 1200 G/mm grating.