| Deep and Vacuum Ultraviolet Spectrophotometer
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VACUUM or PURGED ULTRAVIOLET SPECTROPHOTOMETER
Do you test transmittance and reflectance in the Vacuum Ultraviolet? Do you provide optics, coatings, photo resist materials, substrates, etc. for use in the energetic vacuum region?
The VUVAS directly measures reflectance and transmittance properties of vacuum ultraviolet (VUV) optical components. The VUVAS system works from 120 to 380 nanometers with high throughput, strong signal levels and excellent reliability. The system uses a high throughput 0.2m focal length vacuum monochromator, focused Deuterium light source, a sample chamber capable of holding multiple samples, detectors, and an oil free vacuum pumping system.
The VUVAS operates as a vacuum spectrophotometer in which the source output is scanned and stored. A second scan is made with the sample optical component in the light path. The ratio of the stored scan vs. measurement scan yields the optics reflectance or transmittance properties. Accurate measurement of optical properties can be made over a wide angle range, from near normal incidence to seventy degrees. Polarizer’s have been developed and are available for the system.
The VUVaS comes complete with vacuum pumping or automatic purge-gas and gauge system. Easy to use Spectrometer Control Software (LabView™ based) controls automated parameters and signal recovery.
PDF version of the VUVaS brochure and specifications here.
Look at these ZIPped PDF articles: Spectroscopic Reflectometry.zip and VUVaS Photoresist Absorbance.zip
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The McPherson VUVaS can be equipped with windowless hollow cathode light source in order to reach deeper into the vacuum ultraviolet than the Deuterium source allows. Depending on the gas used, the hollow cathode lamp can work to wavelengths as low as 30nm. The EUV VUVAS is equipped with a grazing incidence off axis parabolic collimator optic to optimize light throughput in the wavelength region less than 110nm. |