Do you provide the semiconductor and other industries with optical coatings, photoresist materials, substrates, etc. for use in the energetic vacuum region?

To rise to the challenge of the semiconductor industry we have developed several vacuum compatible systems for use in the 115 - 380 nm wavelength region.

These system are powerful tools for both industry and research and allow you to keep pace with customer demands for ever deeper, more energetic UV materials.

Rise to the challenge & set the new standards!

The single beam and corrected Vacuum UV Spectrophotometers outlined in the following describe the tools you need to certify material quality as well as products or processes.

VUVaS 1000 single beam systems (%R,%T, absorbance or simple voltage response with variable sample and detector angles)

VUVaS 1000 System control software provides complete control of spectrometer wavelength and sample/reference channels. The provided software offers the following capabilities. All features operate at user set wavelengths or during wavelength scans.

• plot of data from sample detector
• plot of data from reference detector
• simultaneous plot of sample and reference data
• ratio plot of sample and reference data, Abs via post processing
• user input calibration values for reference detector
• reference detector calibration scan

• standard range 115 - 380 nm
• accuracy ± 0.10 nm
• repeatability ± 0.05 nm

• standard range 0.1 - 10 nm

• sample rotation from 0° to 89°
• detector rotation from 10° to 180°

• accuracy to 0.5 % (single beam)
• repeatability to 0.5 % (single beam)

• turbomolecular vacuum pumps safety interlocked
• < 20 minute pump down to measurements

• quantity 5, 1" diameter samples, or
• quantity 3, 2" x 2" samples
• custom holders for 6" diameter , unusually thick and other special samples