| Deep and Vacuum Ultraviolet UV Spectrophotometer
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Deep and vacuum ultraviolet measurements have never been better, or easier. Ultraviolet (UV) spectroscopy has a well-deserved niche. Many UV-Vis instruments claim to work to the deep UV. Some do, better than others. Very few instruments optimize for, or cater to the 120 to 400nm region. Development and manufacture of ultraviolet lasers, optics, crystalline materials, and resonance Raman instruments, as well as basic research, require a broadly useful instrument for analysis, characterization, and test. Enter McPherson’s Vacuum Ultraviolet Analytical Spectrophotometer (VUVAS.)
The McPherson VUVAS instrument meets the requirements of deep and vacuum ultraviolet spectroscopy in the 120 to 400nm range. From clean, particulate free and tight, purge or vacuum capable enclosure, to UV enhanced optics, sources, detectors, and computer optimized optical system. All VUVAS elements improve analytical results and simplify measurement tasks for the user.
The VUVAS spectrophotometer works with gas or liquid sample cells. Most users employ optic-like substrates coated with sample for transmission measurements. A three-position sample holder is standard. Cryogenic single-sample mounts, and raster-mapping attachments for large samples, are available as specials. The VUVAS also allows users to measure reflectance and easily alter angle of incidence to the sample surface. The detector is also adjustable. It can maintain theta/2-theta geometry for specular reflectance measurements, or deviate from this, to measure scatter or dispersive samples.
The VUVAS design delivers absolute measurements. A single detector collects reference data as well as the final transmission or reflectance measurement. This approach enables users to qualify instrument performance, anytime and without extra accessories. The wavelength region below 350nm has very few, if any, standard reference materials. One reason is the energetic ultraviolet light materials must tolerate. There is also the sensitivity of samples to contamination. Contamination by monolayers of water, oxygen or oil have reportedly been responsible for transmission losses of 15% at 157nm. The ability of the VUVAS to prove spectral and photometric precision in-situ provides valid data with confidence.
The VUVAS integrated system is a total solution. The one-touch vacuum (purge) control system and software allow users to perform high quality deep and vacuum ultraviolet measurements more easily and with higher confidence. It complements high performance UV/Vis instruments found in
many laboratories and provides solid performance for the deep and vacuum ultraviolet region.
PDF version of the VUVaS brochure and specifications here.
Look at these ZIPped PDF articles: Spectroscopic Reflectometry.zip and VUVaS Photoresist Absorbance.zip
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The McPherson VUVaS allows you to measure and map transmission and reflectance samples over areas as large as 350 mm diameter. About 0.1% precision is attained throughout the region regardless of measurement mode. Even better precision is attained at specific points of interest, for example 193 and 157nm. The McPherson VUVaS provides easy access to the deep and vacuum ultraviolet region (120 to 380-nm) with purged or vacuum environment. This system may be adapted directly to wafer handling systems. Measurement chambers are clean and particulate free insuring safety of your valuable sample and high integrity measurements. | |
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Measure absorbance, transmittance and reflectance of diverse optical samples. Units are available for the Vacuum and Extreme UV as well as for the UV-Vis-IR. The stainless steel reflectometer holds multiple samples for measurement from 5 to 180degrees (corresponding detector angles from 10 to 180-degrees.) Theta / 2-theta measurements and off-specular scatter measurements are allowed. Some units are available with integrating spheres for diffuse measurements. Heated and cooled sample holders are available and measurements may be performed under vacuum, purged or atmospheric environments. |
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