| VUVaS 2000 : Double Beam Vacuum Ultraviolet Spectrophotometer
|
 |
Test absorbance, transmittance and reflectance (at variable angles) in the vacuum ultraviolet (VUV), 115 to 380nm wavelength region. The McPherson vacuum ultraviolet spectrophotometer (VUVaS) series includes the first vacuum compatible double beam system which simultaneously collects sample and reference spectra and uses a unique, magnetically driven reflective chopper mechanism we developed for this purpose. Individual spectral or ratio results are displayed during acquisition.
Beam collimation delivers a consistent spot size to the sample guaranteeing best results. Standard units accept either (5) 1 inch diameter samples or (3) 2 x 2 inch samples in easy to position sample holders. Six inch diameter wafers and other samples (crystalline cubes, etc.) can be mounted in custom mounts. The variable and selectable sample/detector position permits analysis of irregular or diffractive samples. Detector angles can be set from 10 - 180° allowing users to perform scatter, reflectance or transmittance measurements. Sample angles can be set from 0 to 89degrees.
Interactive computer control of spectrometer wavelength scans and data acquisition makes this a unique and easy to use system for QC/QA and analytical research applications.
You can get a PDF version of a VUVaS brochure here.
The following charts illustrate this system's Precision, Reproducibility, Accuracy, Linearity, Range and Low Noise.
|
Precision Fused Silica, Quartz and Neutral Density Filters
|
Reproducibility Five (5) scans repeating to 0.03 nm
| |
|
Linearity Accurate Quantification of samples and QC/QA
| ||
|
Range Fused Silica, Magnesium Fluoride and 100 %T
|
Low Noise Dual Beam Detection for 0.0008 Au RMS Noise
|
Look at these ZIPped PDF articles: Spectroscopic Reflectometry.zip and VUVaS Photoresist Absorbance.zip
 |
The McPherson VUVaS allows you to measure and map transmission and reflectance samples over areas as large as 350 mm diameter. About 0.1% precision is attained throughout the region regardless of measurement mode. Even better precision is attained at specific points of interest, for example 193 and 157nm. The McPherson VUVaS provides easy access to the deep and vacuum ultraviolet region (120 to 380-nm) with purged or vacuum environment. This system may be adapted directly to wafer handling systems. Measurement chambers are clean and particulate free insuring safety of your valuable sample and high integrity measurements. | |
|
Measure absorbance, transmittance and reflectance of diverse optical samples. Units are available for the Vacuum and Extreme UV as well as for the UV-Vis-IR. The stainless steel reflectometer holds multiple samples for measurement from 5 to 180degrees (corresponding detector angles from 10 to 180-degrees.) Theta / 2-theta measurements and off-specular scatter measurements are allowed. Some units are available with integrating spheres for diffuse measurements. Heated and cooled sample holders are available and measurements may be performed under vacuum, purged or atmospheric environments. |
 |