The new 642-1 Soft X-Ray (SXR) light source from McPherson features a six position anode carousel. Users can easily change anode target materials while in high, or even ultra-high vacuum (UHV).
The New Tunable Soft X-ray Light Source, Use of different solid target anode materials allows
tuning emission eV energy or wavelength to the experiment. The vacuum housing of the source features standard NW40K vacuum flanges (optionally DN40CF). It also features two
equivalent output beams. These provide ability for sample/reference comparison and device calibration. Filter wheels, gate valves, pinhole collimators, and energy- or other
standard detectors are also available.
This electron impact light source uses a hot filament to produce electrons subsequently accelerated towards a solid anode target by high voltage. The SXR and extreme UV output emission spectrum follows the target anode material valence band structure. Readily exchange anodes in the carousel in order to produce desired wavelengths, for example Si (0.71 nm), Mg (0.98 nm), C (4.4 nm) and many more. Many different anodes are available! This source is different from other sealed single wavelength x-ray tubes, because a selection of materials are installed in the evacuated housing at one time.
The new controller for the SXR source provides emission loop regulation for control of the filament and high voltage. One easily operated controller drives source parameters and allows adjusting high-voltage to 10,000 volts and current up to 10 milliamps. The new source is compact and controllable, output is debris free. Stable operation is attained with vacuum of 5 x 10E-5 torr or lower. The McPherson Model 642-1 is easy to set up and provides laboratories excellent, reliable means for at-wavelength calibration, or metrology of SXR lithography materials as well as multilayer or grazing incidence optical systems for astrophysics and other
fundamental research. The source is available on special order with powers high as 300 Watts.